By means of this economical system, wet benches with up to 8 lanes are loaded with wafers either from cassettes or from stack magazines. A parallel robot with special gripper guarantees a soft and gentle handling of the wafers. The wafers are inspected “on the fly”.

Your benefit

• One system for up to 8 lanes (156 mm x 156 mm)
  
• High throughput
• Reduced breakage rate
• Simple wafer tracking
• Precise and reproducible position accuracy
• Integrated “on the fly” wafer tracking