The Wet Wafer Separator WWS features the automatic separation of wet wafers. After pre-cleaning, the wafers in a carrier are loaded into the separating unit. The very first wafer is separated from the pile with minimum mechanical stress. The wafer is then transferred automatically and in an extremely gentle manner to the final cleaning process stage.

YOUR BENEFIT

• Automatic and gentle separation of wet wafers
• Identification of double wafers and broken wafers
• Minimum breakage rate
• High throughput
• Continuous material flow
• Simple wafer tracking